Title:
ULTRA-THIN GLASS MASK PLATE, EVAPORATION METHOD, AND METHOD FOR CLEANING ULTRA-THIN GLASS MASK PLATE
Document Type and Number:
WIPO Patent Application WO/2022/257222
Kind Code:
A1
Abstract:
The present invention provides an ultra-thin glass mask plate, an evaporation method, and a method for cleaning the ultra-thin glass mask plate. The ultra-thin glass mask plate comprises: a mask plate frame, the frame enclosing to form a plurality of empty regions for mounting masks; and a plurality of ultra-thin glass masks, which are respectively connected to the empty regions. Each ultra-thin glass mask comprises an ultra-thin glass body, and a plurality of through holes running through the ultra-thin glass body are formed in a unique substrate region of the ultra-thin glass body along the thickness direction on the basis of a preset evaporation pattern. An inner wall of each through hole is chamfered with the surface of a respective ultra-thin glass body, and the substrate region is exposed out of the empty regions. During evaporation, the through holes in the ultra-thin glass masks allow an evaporation medium to pass through the ultra-thin glass bodies to an evaporation object. According to the present invention, a conventional mask can be replaced with the ultra-thin glass mask plate, which thereby greatly reduces the overall cost of masks, does not require a tensioning step, improves evaporation precision, shortens the total duration of the evaporation process, and increases production efficiency.
Inventors:
CHIANG CHENG-CHUNG (CN)
Application Number:
PCT/CN2021/106172
Publication Date:
December 15, 2022
Filing Date:
July 14, 2021
Export Citation:
Assignee:
CHIANG CHENG CHUNG (CN)
International Classes:
B08B3/08; C23C14/04; C23C14/24
Foreign References:
| KR20200011859A | 2020-02-04 | |||
| CN112266176A | 2021-01-26 | |||
| CN102492920A | 2012-06-13 | |||
| TW200611987A | 2006-04-16 | |||
| CN101295128A | 2008-10-29 |
Attorney, Agent or Firm:
SHANGHAI LUNGTIN LAW FIRM (CN)
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