Title:
ULTRAPURE WATER PRODUCING DEVICE AND ULTRAPURE WATER PRODUCING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/239853
Kind Code:
A1
Abstract:
Provided is an ultrapure water producing device that can continuously produce ultrapure water, ensuring a desired water quality, even while ion exchange resins are being replaced. This ultrapure water producing device is provided with a plurality of branch channels, a plurality of ion exchange devices, a plurality of opening/closing valves, and an aperture changing unit. The plurality of branch channels branch from a channel for water to be treated and converge on the downstream side. Each of the plurality of ion exchange devices is disposed in one of the plurality of branch channels, and each includes an ion exchange resin. Each of the plurality of opening/closing valves is disposed before and after the ion exchange device in each individual branch path. The aperture changing unit changes the apertures of the opening and closing valves along with the passage of a set time.
Inventors:
NAKAMURA SEIICHI (JP)
Application Number:
PCT/JP2019/020676
Publication Date:
December 19, 2019
Filing Date:
May 24, 2019
Export Citation:
Assignee:
NOMURA MICRO SCIENCE KK (JP)
International Classes:
C02F1/42; B01D19/00; B01D61/00; C02F1/32; C02F1/44
Domestic Patent References:
| WO2016199725A1 | 2016-12-15 |
Foreign References:
| JP2018038943A | 2018-03-15 | |||
| JP2002282850A | 2002-10-02 | |||
| JP2015231609A | 2015-12-24 | |||
| JPH09308881A | 1997-12-02 |
Attorney, Agent or Firm:
SAKURA PATENT OFFICE, p.c. (JP)
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