Title:
ULTRAPURE WATER PRODUCTION APPARATUS AND OPERATION METHOD FOR ULTRAPURE WATER PRODUCTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/105188
Kind Code:
A1
Abstract:
An ultrapure water production apparatus 1 is provided with a pretreatment device 2; a primary pure water production device 3; and a subsystem 4. The primary pure water production device 3 has: a tank 5; an ultraviolet oxidation device 6; a platinum group metal catalyst resin column 7; a regenerative ion exchange device 8; and a membrane-type degasifier 9. The subsystem 4 comprises: a subtank 11; an ultraviolet oxidation device 12 for treating primary pure water fed from the subtank 11; a platinum group metal catalyst resin column 13; a membrane-type degasifier 14; a non-regenerative mixed-bed ion exchange device 15; and an ultrafiltration (UF) membrane 16. The platinum group metal catalyst resin is obtained by causing a carrier resin to carry a platinum group metal thereon, and in particular, it is preferable to have nano-order sized particles of a platinum group metal carried on the carrier resin. By having the ultraviolet oxidation device 12 and the platinum group metal catalyst resin column 13 in the subsystem 4, the ultrapure water production apparatus 1 is able to minimize the deterioration of hydrogen peroxide removal capability.
Inventors:
MINATO YASUHARU (JP)
CHUUMAN TAKAAKI (JP)
CHUUMAN TAKAAKI (JP)
Application Number:
PCT/JP2017/032788
Publication Date:
June 14, 2018
Filing Date:
September 12, 2017
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
C02F1/58; B01D61/00; B01D61/44; C02F1/20; C02F1/32; C02F1/42; C02F1/44; C02F1/469; C02F9/02; C02F9/04; C02F9/12
Domestic Patent References:
| WO2005095280A1 | 2005-10-13 | |||
| WO2009122884A1 | 2009-10-08 |
Foreign References:
| JP2015178107A | 2015-10-08 | |||
| JP2003266097A | 2003-09-24 | |||
| JPH0775780A | 1995-03-20 | |||
| JPH0938671A | 1997-02-10 | |||
| JPS61101292A | 1986-05-20 | |||
| JP2007185587A | 2007-07-26 | |||
| JPH0639366A | 1994-02-15 | |||
| JP2000015272A | 2000-01-18 | |||
| JP5512357B2 | 2014-06-04 |
Attorney, Agent or Firm:
HAYAKAWA Yuzi et al. (JP)
Download PDF: