Title:
ULTRAPURE WATER PRODUCTION SYSTEM AND ULTRAPURE WATER PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/198723
Kind Code:
A1
Abstract:
Provided is an ultrapure water production system equipped with a boron adsorption resin-mixed ion exchange resin, wherein high-quality ultrapure water having low concentrations of boron and TOC can be obtained for a long period of time. The ultrapure water production system produces ultrapure water by treating to-be-treated water containing a boron component and a total organic carbon component, and comprises, in order: a first ultraviolet oxidation device for irradiating the to-be-treated water with ultraviolet light at an ultraviolet irradiation dose 0.05-0.2 kWh/m3; a boron adsorption resin-mixed ion exchanger having a boron adsorption anion exchange mixed-bed resin obtained by mixing a boron adsorption resin and an anion exchange resin; a second ultraviolet oxidation device; and a non-regenerative mixed-bed ion exchange resin device.
Inventors:
AMAYA TORU (JP)
MARUYAMA KAZUO (JP)
MARUYAMA KAZUO (JP)
Application Number:
PCT/JP2018/014702
Publication Date:
November 01, 2018
Filing Date:
April 06, 2018
Export Citation:
Assignee:
NOMURA MICRO SCIENCE KK (JP)
International Classes:
C02F1/42; B01J39/05; B01J39/20; B01J41/05; B01J41/14; C02F1/32; C02F1/44; C02F9/12
Domestic Patent References:
| WO2009122884A1 | 2009-10-08 |
Foreign References:
| JP2016047496A | 2016-04-07 | |||
| JP2002263643A | 2002-09-17 | |||
| JP2004025184A | 2004-01-29 | |||
| JP2008173637A | 2008-07-31 | |||
| JP2014100691A | 2014-06-05 | |||
| JPH0884986A | 1996-04-02 |
Attorney, Agent or Firm:
SAKURA PATENT OFFICE, P.C. (JP)
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