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Title:
ULTRAPURE WATER PRODUCTION SYSTEM AND ULTRAPURE WATER PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/188964
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide an ultrapure water production system and an ultrapure water production method capable of shortening a startup period after sterilization of the ultrapure water production system. Provided is an ultrapure water production system 1 that includes an ultrafiltration membrane device 2 and a fine particle filter 3 which are connected in series, and that produces ultrapure water by treating treatment-water with the ultrafiltration membrane device 2 and the fine particle filter 3, in that order, wherein: the ultrafiltration device 2 has a removal rate of 99.8% or more of fine particles having a particle diameter of 20 nm or more; and the fine particle filter 3 is equipped with an oxidizing agent resistant filter membrane. Also provided is an ultrapure water production method.

Inventors:
TANJI AKIRA (JP)
NAGATA SHIORI (JP)
NOGUCHI YUKIO (JP)
Application Number:
PCT/JP2019/012461
Publication Date:
October 03, 2019
Filing Date:
March 25, 2019
Export Citation:
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Assignee:
NOMURA MICRO SCIENCE KK (JP)
International Classes:
C02F1/44; B01D61/18; B01D61/58; B01D69/02; B01D71/34; B01D71/36; B01D71/68; C02F1/32; C02F1/42; C02F1/58; C02F1/70; C02F9/02; C02F9/04; C02F9/12
Domestic Patent References:
WO2015050125A12015-04-09
Foreign References:
US5518624A1996-05-21
JPH1157417A1999-03-02
JPH0760291A1995-03-07
Attorney, Agent or Firm:
SAKURA PATENT OFFICE, p.c. (JP)
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