ULTRAPURE WATER PRODUCTION SYSTEM AND ULTRAPURE WATER PRODUCTION METHOD

WIPO Patent Application WO/2022/085227

A1

Provided are an ultrapure water production system and production method that can contribute to the cleaning of a device and to-be-treated water via a simple configuration during the production of ultrapure water in which after ultrapure water has been used, the used ultrapure water containing hydrogen peroxide is reused as to-be-treated water for ultrapure water production. An ultrapure water production system 1 for producing ultrapure water comprises a pretreatment unit 2, a primary pure water production unit 3, and a secondary pure water production unit 4. The ultrapure water production system 1 further comprises: a storage unit 5 that is provided at a stage preceding the pretreatment unit 2 or between the pretreatment unit 2 and the primary pure water production unit 3, and can store raw water or to-be-treated water; a recovery treatment unit 6 that converts used ultrapure water, containing hydrogen peroxide and obtained after use of ultrapure water, into recovered water in which some or all of the hydrogen peroxide is percolated while removing impurities mixed into the used ultrapure water; and a circulation means 7 that sends the recovered water obtained from the recovery treatment unit 6 back to the storage unit 5 so as to circulate said recovered water.

MIYAZAWA HIROKI (JP)
NOGUCHI YUKIO (JP)

PCT/JP2021/017241

April 28, 2022

April 30, 2021

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NOMURA MICRO SCIENCE KK (JP)

B01D61/02; B01D61/58; C02F1/28; C02F1/44; C02F9/02; C02F9/04; C02F9/12

JP2014226642A	2014-12-08
JP2015157262A	2015-09-03
JP2015100733A	2015-06-04

SAKURA PATENT OFFICE, P.C. (JP)

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