Title:
ULTRAPURE WATER PRODUCTION SYSTEM AND ULTRAPURE WATER PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/113431
Kind Code:
A1
Abstract:
Provided is an ultrapure water production system that efficiently removes microparticles contained in ultrapure water with a simpler configuration. An ultrapure water production system 1 comprises an ultrapure water supply line L1 that is connected to a use point P.O.U. to supply ultrapure water to the use point P.O.U., a return line L2 that returns the ultrapure water that is not used in the use point P.O.U. to the ultrapure water supply line L1, and at least one ion exchange device 10 provided in the ultrapure water supply line L1. Among the at least one ion exchange device 10, the final-stage ion exchange device 10 that is closest to the use point P.O.U. causes the water to be treated flow therethrough at a space velocity of 170 (1/hr) or more.
Inventors:
ICHIHARA FUMITAKA (JP)
SUDO FUMIO (JP)
KONDO TSUKASA (JP)
SUGAWARA HIROSHI (JP)
SUDO FUMIO (JP)
KONDO TSUKASA (JP)
SUGAWARA HIROSHI (JP)
Application Number:
PCT/JP2021/029007
Publication Date:
June 02, 2022
Filing Date:
August 04, 2021
Export Citation:
Assignee:
ORGANO CORP (JP)
International Classes:
C02F1/42; B01D61/18; C02F1/44
Domestic Patent References:
| WO2019221187A1 | 2019-11-21 | |||
| WO2019239853A1 | 2019-12-19 |
Foreign References:
| JP2010234356A | 2010-10-21 | |||
| JPH1057956A | 1998-03-03 | |||
| JPH09187765A | 1997-07-22 | |||
| JP2002263643A | 2002-09-17 | |||
| JP2003145148A | 2003-05-20 |
Attorney, Agent or Firm:
MIYAZAKI Teruo et al. (JP)
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