Title:
ULTRASONIC CLEANING APPARATUS AND ULTRASONIC CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/155548
Kind Code:
A1
Abstract:
Disclosed are an ultrasonic cleaning apparatus and an ultrasonic cleaning method, whereby cleaning nonuniformity generated after ultrasonically cleaning a subject to be cleaned is suppressed. The ultrasonic cleaning apparatus is provided with: a cleaning tank (21) having a cleaning solution (23) therein; first and second ultrasonic vibrators (34a, 34b), which apply ultrasonic vibration to the subject to be cleaned (22) which is immersed in the cleaning solution in the cleaning tank; a first ultrasonic oscillator (36) which applies high frequency output to the first ultrasonic vibrator; a second ultrasonic oscillator (37) which applies high frequency output to the second ultrasonic vibrator; and a controller (38) which performs control by changing the output of the first and/or second ultrasonic oscillator. The first ultrasonic waves oscillated by the first ultrasonic vibrator are interfered with by the second ultrasonic waves oscillated by the second ultrasonic vibrator.
Inventors:
TUZIUTI, Toru (NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 2266-98, Aza-Anagahora, Oaza-ShimoShidami, Moriyama-ku, Nagoya-sh, Aichi 60, 〒4638560, JP)
辻内 亨 (〒60 愛知県名古屋市守山区大字下志段味字穴ヶ洞２２６６番地の９８ 独立行政法人産業技術総合研究所 中部センター内 Aichi, 〒4638560, JP)
IIDA, Yasuo (NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 2266-98, Aza-Anagahora, Oaza-ShimoShidami, Moriyama-ku, Nagoya-sh, Aichi 60, 〒4638560, JP)
飯田 康夫 (〒60 愛知県名古屋市守山区大字下志段味字穴ヶ洞２２６６番地の９８ 独立行政法人産業技術総合研究所 中部センター内 Aichi, 〒4638560, JP)
YASUI, Kyuichi (NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 2266-98, Aza-Anagahora, Oaza-ShimoShidami, Moriyama-ku, Nagoya-sh, Aichi 60, 〒4638560, JP)
辻内 亨 (〒60 愛知県名古屋市守山区大字下志段味字穴ヶ洞２２６６番地の９８ 独立行政法人産業技術総合研究所 中部センター内 Aichi, 〒4638560, JP)
IIDA, Yasuo (NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 2266-98, Aza-Anagahora, Oaza-ShimoShidami, Moriyama-ku, Nagoya-sh, Aichi 60, 〒4638560, JP)
飯田 康夫 (〒60 愛知県名古屋市守山区大字下志段味字穴ヶ洞２２６６番地の９８ 独立行政法人産業技術総合研究所 中部センター内 Aichi, 〒4638560, JP)
YASUI, Kyuichi (NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 2266-98, Aza-Anagahora, Oaza-ShimoShidami, Moriyama-ku, Nagoya-sh, Aichi 60, 〒4638560, JP)
Application Number:
JP2011/063195
Publication Date:
December 15, 2011
Filing Date:
June 02, 2011
Export Citation:
Assignee:
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY (3-1 Kasumigaseki 1-chome, Chiyoda-ku Tokyo, 21, 〒1008921, JP)
独立行政法人産業技術総合研究所 (〒21 東京都千代田区霞が関１－３－１ Tokyo, 〒1008921, JP)
KAIJO CORPORATION (3-1-5, Sakae-cho Hamura-sh, Tokyo 07, 〒2058607, JP)
株式会社カイジョー (〒07 東京都羽村市栄町３丁目１番地の５ Tokyo, 〒2058607, JP)
TUZIUTI, Toru (NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 2266-98, Aza-Anagahora, Oaza-ShimoShidami, Moriyama-ku, Nagoya-sh, Aichi 60, 〒4638560, JP)
辻内 亨 (〒60 愛知県名古屋市守山区大字下志段味字穴ヶ洞２２６６番地の９８ 独立行政法人産業技術総合研究所 中部センター内 Aichi, 〒4638560, JP)
IIDA, Yasuo (NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 2266-98, Aza-Anagahora, Oaza-ShimoShidami, Moriyama-ku, Nagoya-sh, Aichi 60, 〒4638560, JP)
独立行政法人産業技術総合研究所 (〒21 東京都千代田区霞が関１－３－１ Tokyo, 〒1008921, JP)
KAIJO CORPORATION (3-1-5, Sakae-cho Hamura-sh, Tokyo 07, 〒2058607, JP)
株式会社カイジョー (〒07 東京都羽村市栄町３丁目１番地の５ Tokyo, 〒2058607, JP)
TUZIUTI, Toru (NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 2266-98, Aza-Anagahora, Oaza-ShimoShidami, Moriyama-ku, Nagoya-sh, Aichi 60, 〒4638560, JP)
辻内 亨 (〒60 愛知県名古屋市守山区大字下志段味字穴ヶ洞２２６６番地の９８ 独立行政法人産業技術総合研究所 中部センター内 Aichi, 〒4638560, JP)
IIDA, Yasuo (NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 2266-98, Aza-Anagahora, Oaza-ShimoShidami, Moriyama-ku, Nagoya-sh, Aichi 60, 〒4638560, JP)
International Classes:
B08B3/12; C23G3/00; C23G5/00; H01L21/304
Attorney, Agent or Firm:
YANASE, Mutsuyasu et al. (PATENT ATTORNEYS SHINPO, 8th Floor UK Building, 1-32-14, Takadanobaba, Shinjuku-k, Tokyo 75, 〒1690075, JP)
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Claims: