Title:
ULTRASONIC CLEANING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/021405
Kind Code:
A1
Abstract:
Provided is an ultrasonic cleaning apparatus which can easily cope with increase of the diameter of a cleaning surface of a subject to be cleaned. The ultrasonic cleaning apparatus is provided with: an ultrasonic vibrator (13) which applies ultrasonic energy to a propagation liquid (15); an ultrasonic propagation tube (12) wherein the propagation liquid having the ultrasonic energy applied thereto by the ultrasonic vibrator flows; a holding mechanism holding a subject to be cleaned (21) which is arranged below the ultrasonic propagation tube; and a cleaning liquid supplying mechanism which supplies a cleaning liquid to the cleaning surface of the subject to be cleaned which is held by the holding mechanism. The ultrasonic propagation tube (12) is arranged such that the side surface thereof is brought into contact with a liquid film (19) of the cleaning liquid formed on the cleaning surface by supplying the cleaning liquid to the cleaning surface by means of the cleaning liquid supplying mechanism.
Inventors:
SUZUKI, Kazunari (3-1-5 Sakae-cho, Hamura-sh, Tokyo 07, 〒2058607, JP)
鈴木一成 (〒07 東京都羽村市栄町３丁目１番地の５株式会社カイジョー内 Tokyo, 〒2058607, JP)
鈴木一成 (〒07 東京都羽村市栄町３丁目１番地の５株式会社カイジョー内 Tokyo, 〒2058607, JP)
Application Number:
JP2009/064813
Publication Date:
February 25, 2010
Filing Date:
August 19, 2009
Export Citation:
Assignee:
KAIJO CORPORATION (3-1-5, Sakae-cho Hamura-sh, Tokyo 07, 〒2058607, JP)
株式会社カイジョー (〒07 東京都羽村市栄町３丁目１番地の５ Tokyo, 〒2058607, JP)
SUZUKI, Kazunari (3-1-5 Sakae-cho, Hamura-sh, Tokyo 07, 〒2058607, JP)
株式会社カイジョー (〒07 東京都羽村市栄町３丁目１番地の５ Tokyo, 〒2058607, JP)
SUZUKI, Kazunari (3-1-5 Sakae-cho, Hamura-sh, Tokyo 07, 〒2058607, JP)
International Classes:
B08B3/12; H01L21/304
Attorney, Agent or Firm:
YANASE, Mutsuyasu et al. (PATENT ATTORNEYS SHINPO, 8th Floor UK Building, 1-32-14, Takadanobaba, Shinjuku-k, Tokyo 75, 〒1690075, JP)
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