Title:
ULTRASONIC CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/089673
Kind Code:
A1
Abstract:
Disclosed is an ultrasonic cleaning method that, at the very least, cleans an object to be cleaned by immersing the aforementioned object to be cleaned in cleaning fluid that is within a cleaning tank and transmitting ultrasonic waves generated from an ultrasonic transducer to the cleaning fluid that is within the aforementioned cleaning tank, and is characterized by the cleaning of the object to be cleaned by means of the ultrasonic waves generated by the aforementioned ultrasonic transducer being performed under at least two ultrasonic output conditions. As a result, an ultrasonic cleaning method is provided that resolves the problem of uneven cleaning (missed spots), which has been a problem with ultrasonic cleaning, and that can effectively eliminate particles.
Inventors:
KABASAWA, Hitoshi (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
椛澤 均 (〒61 福島県西白河郡西郷村大字小田倉字大平１５０番地信越半導体株式会社 半導体白河研究所内 Fukushima, 〒9618061, JP)
椛澤 均 (〒61 福島県西白河郡西郷村大字小田倉字大平１５０番地信越半導体株式会社 半導体白河研究所内 Fukushima, 〒9618061, JP)
Application Number:
JP2010/007274
Publication Date:
July 28, 2011
Filing Date:
December 15, 2010
Export Citation:
Assignee:
Shin-Etsu Handotai Co.,Ltd. (6-2 Ohtemachi 2-chome, Chiyoda-ku Tokyo, 04, 〒1000004, JP)
信越半導体株式会社 (〒04 東京都千代田区大手町二丁目６番２号 Tokyo, 〒1000004, JP)
KABASAWA, Hitoshi (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
信越半導体株式会社 (〒04 東京都千代田区大手町二丁目６番２号 Tokyo, 〒1000004, JP)
KABASAWA, Hitoshi (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
International Classes:
H01L21/304; B08B3/12
Attorney, Agent or Firm:
YOSHIMIYA, Mikio (1st Shitaya Bldg. 8F, 6-11 Ueno 7-chome, Taito-k, Tokyo 05, 〒1100005, JP)
Claims: