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Patent Searching and Data


Title:
ULTRASONIC PROBE AND ULTRASONIC TESTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/002674
Kind Code:
A1
Abstract:
The objective of the present invention is to make it easy to form an ultrasonic probe capable of transmitting ultrasonic waves having a frequency at least equal to 200 MHz, and an ultrasonic testing device. To this end, a laminated piezoelectric element 40 which is a constituent of an ultrasonic probe 4 is formed by providing a laminated piezoelectric film 48 between a lower electrode 42 and an upper electrode 49. The laminated piezoelectric film 48 comprises a ZnO film 43 having spontaneous polarization in a direction substantially perpendicular to the film surface, and a ScAlN film 44 which is different from ZnO and has spontaneous polarization in the opposite direction to ZnO, and which is formed directly on the ZnO film 43.

Inventors:
OONO Shigeru (2-2, Saiwai-cho 3-chome, Hitachi-sh, Ibaraki 73, 〒3170073, JP)
SUMIKAWA Kenta (2-2, Saiwai-cho 3-chome, Hitachi-sh, Ibaraki 73, 〒3170073, JP)
TAKAHASHI Takuya (2-2, Saiwai-cho 3-chome, Hitachi-sh, Ibaraki 73, 〒3170073, JP)
YANAGITANI Takahiko (104 Totsukamachi 1-chome Shinjuku-k, Tokyo 50, 〒1698050, JP)
Application Number:
JP2016/068420
Publication Date:
January 05, 2017
Filing Date:
June 21, 2016
Export Citation:
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Assignee:
HITACHI POWER SOLUTIONS CO., LTD. (2-2 Saiwai-cho 3-chome, Hitachi-shi Ibaraki, 73, 〒3170073, JP)
International Classes:
H04R17/00; G01N29/24; G01N29/265
Foreign References:
JPH0750437A1995-02-21
JP2007036915A2007-02-08
JP2006129195A2006-05-18
JP2012170760A2012-09-10
JP2008182515A2008-08-07
JP2008254948A2008-10-23
Attorney, Agent or Firm:
ISONO INTERNATIONAL PATENT OFFICE, P.C. (Hulic Toranomon Building, 1-18 Toranomon 1-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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