Title:
ULTRASONIC PROBE AND ULTRASONIC TESTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/002674
Kind Code:
A1
Abstract:
The objective of the present invention is to make it easy to form an ultrasonic probe capable of transmitting ultrasonic waves having a frequency at least equal to 200 MHz, and an ultrasonic testing device. To this end, a laminated piezoelectric element 40 which is a constituent of an ultrasonic probe 4 is formed by providing a laminated piezoelectric film 48 between a lower electrode 42 and an upper electrode 49. The laminated piezoelectric film 48 comprises a ZnO film 43 having spontaneous polarization in a direction substantially perpendicular to the film surface, and a ScAlN film 44 which is different from ZnO and has spontaneous polarization in the opposite direction to ZnO, and which is formed directly on the ZnO film 43.
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Inventors:
OONO SHIGERU (JP)
SUMIKAWA KENTA (JP)
TAKAHASHI TAKUYA (JP)
YANAGITANI TAKAHIKO (JP)
SUMIKAWA KENTA (JP)
TAKAHASHI TAKUYA (JP)
YANAGITANI TAKAHIKO (JP)
Application Number:
PCT/JP2016/068420
Publication Date:
January 05, 2017
Filing Date:
June 21, 2016
Export Citation:
Assignee:
HITACHI POWER SOLUTIONS CO LTD (JP)
International Classes:
H04R17/00; G01N29/24; G01N29/265
Foreign References:
| JPH0750437A | 1995-02-21 | |||
| JP2007036915A | 2007-02-08 | |||
| JP2006129195A | 2006-05-18 | |||
| JP2012170760A | 2012-09-10 | |||
| JP2008182515A | 2008-08-07 | |||
| JP2008254948A | 2008-10-23 |
Attorney, Agent or Firm:
ISONO INTERNATIONAL PATENT OFFICE, P.C. (JP)
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