Title:
ULTRASONIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2016/002971
Kind Code:
A1
Abstract:
An ultrasonic sensor 1 provided with a substrate in which an opening part 18 is formed, a diaphragm 50 provided on the substrate so as to close up the opening part, and an ultrasonic element 10 including a first electrode 14, a piezoelectric layer 15, and a second electrode 16 stacked on a side of the diaphragm 50 opposite the opening part 18, wherein an active part is arranged facing a movable part, the outer shape of the active part is smaller than the outer shape of the movable part in plan view, and a resonance frequency adjustment part 21 for adjusting a resonance frequency is provided in an area on the side of the active part facing at least the movable part, where a direction Z is defined as the direction in which the first electrode 14, the piezoelectric layer 15, and the second electrode 16 are stacked, the active part is defined as a section in which the first electrode 14, the piezoelectric layer 15, and the second electrode 16 overlap in the direction Z, and the movable part is defined as a range in which the diaphragm is able to vibrate due to driving by the active part.
Inventors:
KOJIMA CHIKARA (JP)
Application Number:
PCT/JP2015/069455
Publication Date:
January 07, 2016
Filing Date:
July 06, 2015
Export Citation:
Assignee:
SEIKO EPSON CORP (JP)
International Classes:
H04R17/00; A61B8/00; H01L41/113
Domestic Patent References:
| WO2011001775A1 | 2011-01-06 | |||
| WO2012124341A1 | 2012-09-20 |
Foreign References:
| JP2010165028A | 2010-07-29 | |||
| JP2008051656A | 2008-03-06 | |||
| JP2005051685A | 2005-02-24 | |||
| JP2010147658A | 2010-07-01 |
Attorney, Agent or Firm:
KURIHARA, Hiroyuki et al. (JP)
Hiroyuki Kurihara (JP)
Hiroyuki Kurihara (JP)
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