ULTRASONIC TRANSDUCER AND ULTRASONIC DIAGNOSTIC EQUIPMENT USING THE SAME

Title:

ULTRASONIC TRANSDUCER AND ULTRASONIC DIAGNOSTIC EQUIPMENT USING THE SAME

Document Type and Number:

WIPO Patent Application WO/2012/050172

Kind Code:

A1

Abstract:

High transfer sound pressure and high reception sensitivity are realized, and reliability is improved in terms of long term operation, in a capacitive detector-type ultrasonic transducer (CMUT). The ultrasonic transducer, which has a lower electrode (201), a hollow portion (202) that is formed on the lower electrode and surrounded by insulating films (209,208), an upper electrode (205) that is formed on the hollow portion, and a plurality of insulating film projections (204) that are formed in the hollow portion (202), comprises a plurality of rigid members (203) that are formed on the hollow portion, either the lower electrode (201) and/or the upper electrode (205) is disposed in a position that does not overlap with the insulating film projections (204) when viewed from the upper surface by carving out the portion that overlaps with the insulating film projections (204), and the respective rigid members (203) are disposed such that a region is present that overlaps with the insulating film projections (204) when viewed from the upper surface.

Inventors:

TAKEZAKI TAIICHI (JP)
MACHIDA SHUNTARO (JP)

Application Number:

PCT/JP2011/073582

Publication Date:

April 19, 2012

Filing Date:

October 13, 2011

Export Citation:

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Assignee:

HITACHI MEDICAL CORP (JP)
TAKEZAKI TAIICHI (JP)
MACHIDA SHUNTARO (JP)

International Classes:

H04R19/00; A61B8/00; G01N29/24

Domestic Patent References:

WO2007046180A1

2007-04-26

Foreign References:

JP2007074263A	2007-03-22
JP2006020313A	2006-01-19
JP2006516368A	2006-06-29
JP2009100460A	2009-05-07
JP2002191180A	2002-07-05
US20050228285A1	2005-10-13
US20090322181A1	2009-12-31
JP2007074263A	2007-03-22
JP2007046180A	2007-02-22

Other References: