Title:
ULTRASONIC TRANSDUCER, DISTANCE MEASUREMENT DEVICE, AND METHOD FOR MANUFACTURING ULTRASONIC TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2022/220142
Kind Code:
A1
Abstract:
An ultrasonic transducer (1) comprises: a diaphragm (2) that can generate sound waves; and a cover part (CP) that is connected to the diaphragm (2). The diaphragm (2) and the cover part (CP) are formed integrally with MEMS. The cover section (CP) is provided with a vacant space (3) and a sound hole (4) that is in communication with the vacant space (3). The vacant space (3) and the sound hole (4) form a Helmholtz resonator. The equivalent mass of the diaphragm (2) is greater than the equivalent mass of the Helmholtz resonator.
Inventors:
KONNO NOBUAKI (JP)
TANAKA KOJI (JP)
HIRATA YOSHIAKI (JP)
KAJIYAMA YOSHITAKA (JP)
TANAKA KOJI (JP)
HIRATA YOSHIAKI (JP)
KAJIYAMA YOSHITAKA (JP)
Application Number:
PCT/JP2022/016265
Publication Date:
October 20, 2022
Filing Date:
March 30, 2022
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H04R1/28; H04R17/00
Domestic Patent References:
| WO2013122048A1 | 2013-08-22 |
Foreign References:
| JP2005051689A | 2005-02-24 | |||
| CN111001553A | 2020-04-14 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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