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Title:
ULTRASONIC TRANSDUCER ELEMENT AND ULTRASONIC ENDOSCOPE
Document Type and Number:
WIPO Patent Application WO/2014/077106
Kind Code:
A1
Abstract:
An ultrasonic transducer element (20) is provided with: a substrate (11); and a cell group (10Z) composed of a plurality of cells (10) each comprising a lower electrode (12) placed on the substrate (11), a membrane (18) including an upper electrode (16) disposed to face the lower electrode (12) with a cavity (14H) therebetween, and a plurality of columns (14) which form the cavity (14H) by supporting the membrane (18), the respective cavities (14H) communicating with each other.

Inventors:
MATSUMOTO KAZUYA (JP)
WAKABAYASHI KATSUHIRO
Application Number:
PCT/JP2013/078935
Publication Date:
May 22, 2014
Filing Date:
October 25, 2013
Export Citation:
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Assignee:
OLYMPUS CORP (JP)
OLYMPUS MEDICAL SYSTEMS CORP (JP)
International Classes:
H04R19/00; A61B8/12; H01L29/84
Domestic Patent References:
WO2010053032A12010-05-14
Foreign References:
JP2008546239A2008-12-18
JP2007229327A2007-09-13
US6854338B22005-02-15
Other References:
See also references of EP 2922311A4
Attorney, Agent or Firm:
ITOH SUSUMU (JP)
Susumu Ito (JP)
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