Title:
ULTRAVIOLET-ABSORPTIVE POLYMER MATERIAL
Document Type and Number:
WIPO Patent Application WO/1988/004306
Kind Code:
A1
Abstract:
An ultraviolet-absorptive polymer material which comprises a copolymer between a methacrylic ester monomer and other vinyl monomer having a color-forming group showing an absorption peak different from that of the methacrylic ester in the ultraviolet wavelength region. This polymer material is useful as a resist material showing a high etching effect and a high resolution.
Inventors:
TAKAHASHI TORU (JP)
SHIMOMURA TAKESHI (JP)
MURAHARA MASATAKA (JP)
SHIMOMURA TAKESHI (JP)
MURAHARA MASATAKA (JP)
Application Number:
PCT/JP1987/000954
Publication Date:
June 16, 1988
Filing Date:
December 09, 1987
Export Citation:
Assignee:
TERUMO CORP (JP)
International Classes:
C08F246/00; G03C1/04; G03C1/815; G03C5/16; G03F7/039; (IPC1-7): C08F20/12; C08F26/00; C08F212/00; G03C1/00
Foreign References:
| JPS58111942A | 1983-07-04 | |||
| JPS58178351A | 1983-10-19 | |||
| JPS6038411A | 1985-02-28 | |||
| JPS5838269A | 1983-03-05 | |||
| EP0190003A2 | 1986-08-06 | |||
| JPS51851B1 | 1976-01-12 | |||
| JPS59198123A | 1984-11-09 | |||
| JPS58163617A | 1983-09-28 |
Other References:
See also references of EP 0343246A1
Download PDF:
Previous Patent: MATERIALS WITH NITROGENOUS SIX-MEMBERED RINGS
Next Patent: ONE-PACK CURING COMPOSITION
Next Patent: ONE-PACK CURING COMPOSITION