Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ULTRAVIOLET EXPOSURE DEVICE FOR MANUFACTURING BIOCHIP
Document Type and Number:
WIPO Patent Application WO/2017/105014
Kind Code:
A1
Abstract:
The present description relates to an ultraviolet exposure device for manufacturing a biochip, wherein the volume taken up by the device is reduced so that the device can be used even in a small space, the cost required for the manufacture of the device can be reduced so that the device can be generally used without a heavy cost burden, and the device enables the manufacture of a master mold which is used to manufacture a biochip having a microstructure.

More Like This:
JP3216240ALIGNING METHOD AND PROJECTING EXPOSURE APPARATUS USING THE SAME
JP2787133[Title of Invention] Illumination Optical Device
JP4770090Manufacturing method of optical element holding device, lens barrel and exposure device, and micro device
Inventors:
KWAK BONGSEOP (KR)
JEONG KI SOO (KR)
LEE KANG-HO (KR)
PARK KYOUNG TAIK (KR)
Application Number:
PCT/KR2016/014103
Publication Date:
June 22, 2017
Filing Date:
December 02, 2016
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
KOREA MACH & MATERIALS INST (KR)
International Classes:
G03F7/20
Foreign References:
KR101256791B12013-04-19
JP2009237442A2009-10-15
JPH0943849A1997-02-14
KR101110790B12012-02-15
KR20070027013A2007-03-09
Attorney, Agent or Firm:
PANKOREA PATENT AND LAW FIRM (KR)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: MODIFIED MONOMER, MODIFIED POLYMER COMPRISING SAME, AND METHOD FOR PRODUCING MODIFIED MONOMER AND MO...

Next Patent: ELECTRONIC DEVICE AND METHOD OF OPERATING THE SAME