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Title:
ULTRAVIOLET IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/152331
Kind Code:
A1
Abstract:
Provided is a small ultraviolet irradiation device which can emit ultraviolet rays in a highly efficient manner. Specifically disclosed is an ultraviolet irradiation device, wherein a container, which is hermetically sealed so that the interior thereof has a negative pressure and which has an ultraviolet ray transmissible window, is provided with a semiconductor multilayer film element and an electron beam irradiation source which irradiates the semiconductor multilayer film element with an electron beam. The semiconductor multilayer film element is provided with an active layer having a single quantum well structure or a multiple quantum well structure formed from InxAlyGa1-x-yN (wherein 0≤x<1, 0

Inventors:
KAWAKAMI, Yoichi (Grad. School of Engineering, Kyoto Univ. Kyoto Daigaku Katsura, Nishikyo-ku, Kyoto-sh, Kyoto 10, 〒6158510, JP)
川上 養一 (〒10 京都府京都市西京区京都大学桂 国立大学法人京都大学大学院工学研究科内 Kyoto, 〒6158510, JP)
FUNATO, Mitsuru (Grad. School of Engineering, Kyoto Univ. Kyoto Daigaku Katsura, Nishikyo-ku, Kyoto-sh, Kyoto 10, 〒6158510, JP)
船戸 充 (〒10 京都府京都市西京区京都大学桂 国立大学法人京都大学大学院工学研究科内 Kyoto, 〒6158510, JP)
OTO, Takao (Grad. School of Engineering, Kyoto Univ. Kyoto Daigaku Katsura, Nishikyo-ku, Kyoto-sh, Kyoto 10, 〒6158510, JP)
大音 隆男 (〒10 京都府京都市西京区京都大学桂 国立大学法人京都大学大学院工学研究科内 Kyoto, 〒6158510, JP)
BANAL, Ryan Ganipan (Grad. School of Engineering, Kyoto Univ. Kyoto Daigaku Katsura, Nishikyo-ku, Kyoto-sh, Kyoto 10, 〒6158510, JP)
Application Number:
JP2011/062322
Publication Date:
December 08, 2011
Filing Date:
May 30, 2011
Export Citation:
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Assignee:
Kyoto University (36-1, Yoshida-Honmachi Sakyo-ku, Kyoto-sh, Kyoto 01, 〒6068501, JP)
国立大学法人京都大学 (〒01 京都府京都市左京区吉田本町36番地1 Kyoto, 〒6068501, JP)
Ushio Denki Kabushiki Kaisha (2-6-1, Ote-machi Chiyoda-k, Tokyo 50, 〒1008150, JP)
ウシオ電機株式会社 (〒50 東京都千代田区大手町2丁目6番1号 Tokyo, 〒1008150, JP)
KAWAKAMI, Yoichi (Grad. School of Engineering, Kyoto Univ. Kyoto Daigaku Katsura, Nishikyo-ku, Kyoto-sh, Kyoto 10, 〒6158510, JP)
川上 養一 (〒10 京都府京都市西京区京都大学桂 国立大学法人京都大学大学院工学研究科内 Kyoto, 〒6158510, JP)
FUNATO, Mitsuru (Grad. School of Engineering, Kyoto Univ. Kyoto Daigaku Katsura, Nishikyo-ku, Kyoto-sh, Kyoto 10, 〒6158510, JP)
船戸 充 (〒10 京都府京都市西京区京都大学桂 国立大学法人京都大学大学院工学研究科内 Kyoto, 〒6158510, JP)
OTO, Takao (Grad. School of Engineering, Kyoto Univ. Kyoto Daigaku Katsura, Nishikyo-ku, Kyoto-sh, Kyoto 10, 〒6158510, JP)
International Classes:
H01J63/06; B82Y20/00; H01L33/06
Foreign References:
JP2001251001A2001-09-14
JP2001237455A2001-08-31
JPH02188980A1990-07-25
JP2006190541A2006-07-20
JPH05218589A1993-08-27
JP2007294698A2007-11-08
JP3667188B22005-07-06
Other References:
See also references of EP 2579295A4
Attorney, Agent or Firm:
OHI, Masahiko (Nissenren-Asahiseimei Building, 4 Kanda Surugadai 3-chome, Chiyoda-k, Tokyo 62, 〒1010062, JP)
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Claims: