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Title:
ULTRAVIOLET LIGHT GENERATING TARGET, ELECTRON-BEAM-EXCITED ULTRAVIOLET LIGHT SOURCE, AND METHOD FOR PRODUCING ULTRAVIOLET LIGHT GENERATING TARGET
Document Type and Number:
WIPO Patent Application WO/2012/147743
Kind Code:
A1
Abstract:
An ultraviolet light generating target (20) is provided with: a substrate (21) comprising sapphire, quartz, or rock crystal; and a Pr:LuAG polycrystalline film (22) that is provided on the substrate (21) and that generates ultraviolet light by receiving an electron beam. It is possible to significantly increase ultraviolet light generation efficiency compared to when using a Pr:LuAG monocrystalline film by means of using Pr:LuAG polycrystals as the target.

Inventors:
HONDA Yoshinori (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
本多 慶範 (〒58 静岡県浜松市東区市野町1126番地の1 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
FUKUYO Fumitsugu (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
福世 文嗣 (〒58 静岡県浜松市東区市野町1126番地の1 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
SUZUKI Takashi (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
鈴木 孝 (〒58 静岡県浜松市東区市野町1126番地の1 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
ICHIKAWA Norio (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
Application Number:
JP2012/060975
Publication Date:
November 01, 2012
Filing Date:
April 24, 2012
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS K.K. (1126-1, Ichino-cho Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
浜松ホトニクス株式会社 (〒58 静岡県浜松市東区市野町1126番地の1 Shizuoka, 〒4358558, JP)
HONDA Yoshinori (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
本多 慶範 (〒58 静岡県浜松市東区市野町1126番地の1 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
FUKUYO Fumitsugu (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
福世 文嗣 (〒58 静岡県浜松市東区市野町1126番地の1 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
SUZUKI Takashi (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
鈴木 孝 (〒58 静岡県浜松市東区市野町1126番地の1 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
International Classes:
C09K11/80; H01J63/06
Domestic Patent References:
WO2010097731A12010-09-02
WO2006049284A12006-05-11
WO2009031584A12009-03-12
WO2006049284A12006-05-11
Foreign References:
JP2007294698A2007-11-08
JP2010235388A2010-10-21
JP2009227794A2009-10-08
JP2006335915A2006-12-14
JP2009238415A2009-10-15
JP2006520836A2006-09-14
JP2006520836A2006-09-14
Other References:
See also references of EP 2703470A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (SOEI PATENT AND LAW FIRM, Marunouchi MY PLAZA 9th fl. 1-1, Marunouchi 2-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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Claims: