Title:
ULTRAVIOLET SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/214787
Kind Code:
A1
Abstract:
The present disclosure relates to an ultraviolet sensor, the technical problem to be solved being to provide a high-efficiency ultraviolet sensor in a simple and low-cost manner by means of aerosol deposition. To this end, the present disclosure provides an ultraviolet sensor comprising: a substrate; a polycrystalline film provided by spraying a powder, having an energy band gap of 3 eV to 11 eV and an average central particle size of 0.1 μm to 5 μm, on the substrate in a vacuum through a nozzle at a speed of 100 m/s to 500 m/s, wherein the average central particle size of particles forming the polycrystalline film is 1 nm to 500 nm; and at least two electrodes provided on the polycrystalline film.
Inventors:
PARK JAE HYUK (KR)
Application Number:
PCT/KR2023/006016
Publication Date:
November 09, 2023
Filing Date:
May 03, 2023
Export Citation:
Assignee:
PARK JAE HYUK (KR)
HYPER MAT INC (KR)
HYPER MAT INC (KR)
International Classes:
G01J1/42; H01L31/101
Foreign References:
| JP2011199176A | 2011-10-06 | |||
| JP6307071B2 | 2018-04-04 | |||
| KR20060041936A | 2006-05-12 | |||
| JP2017028103A | 2017-02-02 | |||
| KR20210012133A | 2021-02-03 |
Attorney, Agent or Firm:
SUNGAM SUH INTERNATIONAL PATENT & LAW FIRM (KR)
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