Title:
ULTRAVIOLET-TRANSMITTING MICROWAVE REFLECTOR COMPRISING A MICROMESH SCREEN
Document Type and Number:
WIPO Patent Application WO/2010/048227
Kind Code:
A3
Abstract:
An ultraviolet-transmitting microwave reflector for a substrate processing chamber, comprises a micromesh screen extending across the metallic frame. In one version, the micromesh screen comprises at least one electroformed layer. A method of fabricating the microwave reflector comprises electroforming a metallic frame surrounding a micromesh screen such that the micromesh screen comprises an open area of greater than 80% of the total area.
Inventors:
NGUYEN TUAN ANH (US)
YANG YAO-HUNG (US)
BALUJA SANJEEV (US)
NOWAK THOMAS (US)
ROCHA-ALVAREZ JUAN CARLOS (US)
YANG YAO-HUNG (US)
BALUJA SANJEEV (US)
NOWAK THOMAS (US)
ROCHA-ALVAREZ JUAN CARLOS (US)
Application Number:
PCT/US2009/061380
Publication Date:
July 15, 2010
Filing Date:
October 20, 2009
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
NGUYEN TUAN ANH (US)
YANG YAO-HUNG (US)
BALUJA SANJEEV (US)
NOWAK THOMAS (US)
ROCHA-ALVAREZ JUAN CARLOS (US)
NGUYEN TUAN ANH (US)
YANG YAO-HUNG (US)
BALUJA SANJEEV (US)
NOWAK THOMAS (US)
ROCHA-ALVAREZ JUAN CARLOS (US)
International Classes:
H01L21/324; H01L21/203; H01L21/205
Foreign References:
| US20070232083A1 | 2007-10-04 | |||
| US20070252500A1 | 2007-11-01 | |||
| JP2006147782A | 2006-06-08 |
Attorney, Agent or Firm:
JANAH, Ashok (P.C.650 Delancey Street, Suite 10, San Francisco California, US)
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