Title:
UNDERLYING LAYER OF ALIGNMENT FILM FOR OXIDE SUPERCONDUCTOR, METHOD OF FORMING SAME, AND DEVICE FOR FORMING SAME
Document Type and Number:
WIPO Patent Application WO/2011/043409
Kind Code:
A1
Abstract:
Disclosed is a method of forming an underlying layer of an alignment film for an oxide superconductor, which comprises arranging two or more kinds of targets in the longitudinal direction of a base such that the targets oppose a surface of the base; simultaneously irradiating surfaces of the two or more kinds of targets with ion beams so that constituent particles of the two or more kinds of targets are deposited on the surface of the base in the order in which the two or more kinds of targets are arranged; and forming a laminate including two or more kinds of thin layers repeatedly laminated on the surface of the base by passing the base through deposition regions of the constituent particles a plurality of times so that the constituent particles of the two or more kinds of targets are repeatedly deposited on the surface of the base at each passage of the base.
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Inventors:
HANYU Satoru (Sakura Works 1440, Mutsuzaki, Sakura-sh, Chiba 50, 〒2858550, JP)
羽生 智 (〒50 千葉県佐倉市六崎1440番地 株式会社フジクラ 佐倉事業所内 Chiba, 〒2858550, JP)
羽生 智 (〒50 千葉県佐倉市六崎1440番地 株式会社フジクラ 佐倉事業所内 Chiba, 〒2858550, JP)
Application Number:
JP2010/067624
Publication Date:
April 14, 2011
Filing Date:
October 07, 2010
Export Citation:
Assignee:
Fujikura Ltd. (5-1 Kiba 1-chome, Kohtoh-ku Tokyo, 12, 〒1358512, JP)
株式会社フジクラ (〒12 東京都江東区木場1丁目5番1号 Tokyo, 〒1358512, JP)
HANYU Satoru (Sakura Works 1440, Mutsuzaki, Sakura-sh, Chiba 50, 〒2858550, JP)
株式会社フジクラ (〒12 東京都江東区木場1丁目5番1号 Tokyo, 〒1358512, JP)
HANYU Satoru (Sakura Works 1440, Mutsuzaki, Sakura-sh, Chiba 50, 〒2858550, JP)
International Classes:
H01B13/00; C23C14/08; C23C14/34; C23C14/46; H01B12/06
Attorney, Agent or Firm:
SHIGA Masatake et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
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