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Title:
UNMEASURED AREA EXTRACTION DEVICE, WORK GUIDANCE DEVICE, AND WORK GUIDANCE METHOD
Document Type and Number:
WIPO Patent Application WO/2018/185893
Kind Code:
A1
Abstract:
This unmeasured area extraction device is provided with a position measurement unit for measuring position information for each part of an object under measurement, an image acquisition unit for acquiring image information for the parts under measurement of the object under measurement that have been measured by the position measurement unit, an overall image generation unit for generating overall image information for the object under measurement from the image information for each part under measurement, and an unmeasured part extraction unit for extracting a part where position information for the object under measurement is unmeasured on the basis of the overall image information.

Inventors:
MATSUHIRA MASAYA (JP)
Application Number:
PCT/JP2017/014280
Publication Date:
October 11, 2018
Filing Date:
April 05, 2017
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
G01B21/20; B05C11/00; G01B21/08
Foreign References:
JP2016151423A2016-08-22
JP2013092456A2013-05-16
JP2002074347A2002-03-15
US20130260016A12013-10-03
JPH1047935A1998-02-20
US20150317070A12015-11-05
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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