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Patent Searching and Data


Title:
UNSTABLE ELECTROSTATIC SPRING ACCELEROMETER
Document Type and Number:
WIPO Patent Application WO/2011/157882
Kind Code:
A3
Abstract:
The systems and methods described here tackle the deficiencies of the prior art by making it possible to produce and use accelerometers, whether based on MEMS, NEMS or CMOS-MEMS, in the same integrated circuit board or block as a CMOS chip. In one embodiment, the accelerometer is produced on the same integrated circuit board or block as a CMOS chip using a typical CMOS production method.

Inventors:
MONTANYÀ Silvestre, Josep, I. (C/ Terrasa 42-44, 2on C, Rubí, E-08191, ES)
FERNÁNDEZ MARTÍNEZ, Daniel (Riera Bonet 1, 2º2ª-A, Molins de Rei, E-08915, ES)
Application Number:
ES2011/070445
Publication Date:
December 22, 2011
Filing Date:
June 20, 2011
Export Citation:
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Assignee:
BAOLAB MICROSYSTEMS SL (Institut Politecnic del Campus de Terrassa - Mod TR25, Cta Nacional 150 Km 145, Terrassa, E-08220, ES)
MONTANYÀ Silvestre, Josep, I. (C/ Terrasa 42-44, 2on C, Rubí, E-08191, ES)
FERNÁNDEZ MARTÍNEZ, Daniel (Riera Bonet 1, 2º2ª-A, Molins de Rei, E-08915, ES)
International Classes:
G01P15/00; G01P15/08; G01P15/097; G01P15/125; G01P15/13; G01P15/16; G01P21/00
Domestic Patent References:
WO2004088329A12004-10-14
Foreign References:
US2940306A1960-06-14
US3252333A1966-05-24
Attorney, Agent or Firm:
ELZABURU MARQUEZ, Alberto de et al. (c/ Miguel Angel, 21 2º, Madrid, E-28010, ES)
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