Title:
UPPER COVER OPENING MECHANISM OF REACTION CHAMBER, AND REACTION CHAMBER
Document Type and Number:
WIPO Patent Application WO/2016/011761
Kind Code:
A1
Abstract:
Provided are a reaction chamber and an upper cover opening mechanism thereof. The upper cover opening mechanism is located on one side of the reaction chamber (20) and comprises at least one driving unit (23). Each driving unit (23) comprises a first fixed member (230), a second fixed member (231), a first connection member (232), and a driving apparatus (233). The first fixed member (230) is fixed on the upper cover (22), and is hingedly connected to the first end of the first connection member (232). The driving apparatus (233) is hingedly connected to the second end of the first connection member (232). The second fixed member (231) is fixed to a cavity (21) of the reaction chamber (20), and is hingedly connected to the first connection member (232) between the first end and the second end of the first connection member (232).
Inventors:
ZHANG PENG (CN)
Application Number:
PCT/CN2014/093105
Publication Date:
January 28, 2016
Filing Date:
December 05, 2014
Export Citation:
Assignee:
BEIJING NMC CO LTD (CN)
International Classes:
F16J13/16; H01L21/67
Foreign References:
| JPH1089482A | 1998-04-07 | |||
| JP2000046184A | 2000-02-18 | |||
| JP2012087923A | 2012-05-10 | |||
| KR20080082211A | 2008-09-11 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
北京天昊联合知识产权代理有限公司 (CN)
北京天昊联合知识产权代理有限公司 (CN)
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