Title:
USE OF MIXED BASES TO ENHANCE PATTERNED RESIST PROFILES ON CHROME OR SENSITIVE SUBSTRATES
Document Type and Number:
WIPO Patent Application WO2005088393
Kind Code:
A8
Abstract:
Resist compositions having good footing properties even on difficult substrates are obtained by using a combination of base additives including a room temperature solid base, and a liquid low vapor pressure base. The compositions are especially useful on metal substrates such as chromium-containing layers commonly used in mask-making.
Inventors:
MOREAU WAYNE M (US)
ANGELOPOULOS MARIE (US)
HUANG WU-SONG (US)
MEDEIROS DAVID R (US)
PETRILLO KAREN E (US)
ANGELOPOULOS MARIE (US)
HUANG WU-SONG (US)
MEDEIROS DAVID R (US)
PETRILLO KAREN E (US)
Application Number:
PCT/US2004/004144
Publication Date:
September 14, 2006
Filing Date:
February 11, 2004
Export Citation:
Assignee:
IBM (US)
MOREAU WAYNE M (US)
ANGELOPOULOS MARIE (US)
HUANG WU-SONG (US)
MEDEIROS DAVID R (US)
PETRILLO KAREN E (US)
MOREAU WAYNE M (US)
ANGELOPOULOS MARIE (US)
HUANG WU-SONG (US)
MEDEIROS DAVID R (US)
PETRILLO KAREN E (US)
International Classes:
G03C1/73; G03F7/004; G03F7/039; G03F7/20; G03F7/30; G03F7/40; G03F1/08
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