Title:
UV LIGHT SOURCE HAVING COMBINED IONIZATION AND FORMATION OF EXCIMERS
Document Type and Number:
WIPO Patent Application WO/2014/060592
Kind Code:
A1
Abstract:
The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber having several gas-filled plasma chambers (11, 12), wherein the chamber has at least one area (37, 39) transparent to UV light and/or VUV light. A first group (11) of plasma chambers is filled with an ionizable gas containing mercury and a second group (12) of plasma chambers is filled with a gas that forms excimers when suitably excited.
Inventors:
BENTSIAN ELKIN (DE)
LOHNER ALEXANDER (DE)
EGNER SIEGFRIED (DE)
LOHNER ALEXANDER (DE)
EGNER SIEGFRIED (DE)
Application Number:
PCT/EP2013/071880
Publication Date:
April 24, 2014
Filing Date:
October 18, 2013
Export Citation:
Assignee:
FRAUNHOFER GES FORSCHUNG (DE)
International Classes:
H01J61/94; C02F1/32; H01J65/04
Foreign References:
| JP2010218729A | 2010-09-30 | |||
| DE102006022970B3 | 2007-11-22 | |||
| EP0385205A1 | 1990-09-05 | |||
| US6193894B1 | 2001-02-27 | |||
| US4255663A | 1981-03-10 | |||
| DE4430300C1 | 1995-12-21 | |||
| DE3320597A1 | 1984-12-13 |
Attorney, Agent or Firm:
Dreiss Patentanwälte Partnerschaft (DE)
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