Title:
UV REFLECTIVE MIRRORS FOR DISPLAY FABRICATION
Document Type and Number:
WIPO Patent Application WO/2020/046739
Kind Code:
A3
Abstract:
An apparatus is disclosed which includes an ultraviolet laser and at least one reflective mirror having a substrate which is made from beryllium, an aluminum metal matrix, or silicon carbide. The at least one mirror is adapted to reflect a laser beam generated from the ultraviolet laser, which can then be used on a silicon film used in the production of an electronic display. The laser beam can be used to anneal the silicon film, or in a laser lift-off process for separating the silicon film from a temporary substrate upon which the silicon film was mounted.
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Inventors:
SONG KI-SUNG (US)
LEE HUNHO (US)
VIDAL EDGAR E (US)
CHUNG KYUNG H (US)
CLUNE JASON R (US)
LEE HUNHO (US)
VIDAL EDGAR E (US)
CHUNG KYUNG H (US)
CLUNE JASON R (US)
Application Number:
PCT/US2019/047871
Publication Date:
April 09, 2020
Filing Date:
August 23, 2019
Export Citation:
Assignee:
MATERION CORP (US)
International Classes:
G02B5/08
Foreign References:
| US20050045830A1 | 2005-03-03 | |||
| US20030147131A1 | 2003-08-07 |
Other References:
ANONYMOUS, SPIE, PO BOX 10 BELLINGHAM WA 98227-0010 USA, 31 December 2010 (2010-12-31), XP040527775
Attorney, Agent or Firm:
KLEIN, Richard M. (US)
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