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Title:
VACUUM ARC FILM-FORMING APPARATUS AND FILM-FORMING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/208094
Kind Code:
A1
Abstract:
A vacuum arc film-forming apparatus for forming a ta-C film on a substrate using arc discharge comprises: a holding unit for holding a target part; an anode part into which electrons discharged from said target part flow; and an electric power source for supplying electric current for generating plasma between the target part and the anode part by arc discharge. The current that the electric power source supplies during said arc discharge is one in which a pulsed electric current with a pulse frequency of not more than 140 Hz is superimposed on a direct current.

Inventors:
YAKUSHIJI Hiroshi (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
WATANABE Yuto (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
SHIBAMOTO Masahiro (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
MIURA Yuzuru (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
Application Number:
JP2015/085230
Publication Date:
December 29, 2016
Filing Date:
December 16, 2015
Export Citation:
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Assignee:
CANON ANELVA CORPORATION (2-5-1, Kurigi Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
International Classes:
C23C14/32; C23C14/00; C23C14/06; C23C14/24; G11B5/84
Foreign References:
JP2011503350A2011-01-27
JP2007501331A2007-01-25
JP2002501575A2002-01-15
JP2009545670A2009-12-24
JP2008533686A2008-08-21
Other References:
MUTSUMI HORIKOSHI ET AL.: "Shinku Ark Jochaku a-C Maku ni Okeru Droplet-su Mitsudo no Pulse Hoden Shuhasu Izonsei", DAI 20 KAI DIAMOND SYMPOSIUM KOEN YOSHISHU, 21 November 2006 (2006-11-21), pages 72 - 73
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (7th Fl, Kioicho Park Bldg. 3-6, Kioicho, Chiyoda-k, Tokyo 94, 〒1020094, JP)
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