Title:
VACUUM CAVITY
Document Type and Number:
WIPO Patent Application WO/2023/245883
Kind Code:
A1
Abstract:
Disclosed in the present application is a vacuum cavity, which comprises a cavity frame, a front cavity door assembly and a rear cavity door assembly, wherein the front cavity door assembly and the rear cavity door assembly are connected to the cavity frame by means of connecting mechanisms; the front cavity door assembly and the rear cavity door assembly are arranged on two sides of the cavity frame; and at least one of the front cavity door assembly and the rear cavity door assembly is configured to have a multi-cavity-door structure. In the present application, the mass of a cavity door is reduced by means of the multi-cavity-door structure, thereby reducing the load on hinges.
Inventors:
DAI JIA (CN)
ZHU HENAN (CN)
DONG XUEDI (CN)
LIN JIAJI (CN)
ZHU HENAN (CN)
DONG XUEDI (CN)
LIN JIAJI (CN)
Application Number:
PCT/CN2022/118599
Publication Date:
December 28, 2023
Filing Date:
September 14, 2022
Export Citation:
Assignee:
LAPLACE WUXI SEMICONDUCTOR TECH CO LTD (CN)
International Classes:
C23C14/56; C23C16/44; E06B3/36
Foreign References:
| US20140087072A1 | 2014-03-27 | |||
| CN104712224A | 2015-06-17 | |||
| CN215713349U | 2022-02-01 | |||
| US20100090573A1 | 2010-04-15 |
Attorney, Agent or Firm:
BEYOND ATTORNEYS AT LAW (CN)
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