Title:
VACUUM CHAMBER ASSEMBLY FOR SUPPORTING A WORKPIECE
Document Type and Number:
WIPO Patent Application WO/2012/027406
Kind Code:
A3
Abstract:
A chamber assembly (26) for providing a sealed chamber (40) adjacent to a workpiece (28) to counteract the influence of gravity on the workpiece (28) includes a chamber housing (244), and a seal assembly (33) that expands and/or contracts to better seal against the workpiece (28). Further, the chamber assembly (26) can include one or more transducer assemblies (34) that expand or contract to quickly respond to leaks or injections of fluid in chamber assembly (26) to maintain a constant and stable chamber pressure in the chamber assembly (26). Moreover, the chamber assembly (26) can utilize a pressure source (35) that directs a lager amount of fluid (374) through a fluid passageway (368) to accurately maintain the pressure within the chamber assembly (26).
Inventors:
HASHEMI FARDAD A (US)
WATSON DOUGLAS C (US)
WATSON DOUGLAS C (US)
Application Number:
PCT/US2011/048862
Publication Date:
August 16, 2012
Filing Date:
August 23, 2011
Export Citation:
Assignee:
NIPPON KOGAKU KK (JP)
HASHEMI FARDAD A (US)
WATSON DOUGLAS C (US)
HASHEMI FARDAD A (US)
WATSON DOUGLAS C (US)
International Classes:
C22B9/22; C22B9/16; H01J37/02
Foreign References:
| US6333775B1 | 2001-12-25 | |||
| US7717966B2 | 2010-05-18 | |||
| US6600547B2 | 2003-07-29 | |||
| US6323494B1 | 2001-11-27 | |||
| US20100245795A1 | 2010-09-30 | |||
| US3759662A | 1973-09-18 | |||
| US4229655A | 1980-10-21 | |||
| US6222603B1 | 2001-04-24 |
Attorney, Agent or Firm:
ROEDER, Steven, G. (5560 Chelsea AvenueLa Jolla, CA, US)
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