Title:
VACUUM CHAMBER HAVING MULTILAYER GRAPHITE STACK
Document Type and Number:
WIPO Patent Application WO/2024/010314
Kind Code:
A1
Abstract:
The present invention provides a vacuum chamber having a multilayer graphite stack. The objective of the present invention is to provide a vacuum chamber having a multilayer graphite stack, the chamber having a graphite unit, formed by stacking a plurality of graphite sheets, that is vacuum-accommodated in a chamber housing, thereby maximizing thermal diffusion efficiency so as to ensure excellent cooling performance, and decreasing heat transfer in the vertical direction so that heat can be uniformly diffused in the horizontal direction.
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Inventors:
JOO HAK SIK (KR)
JOO SE HYUN (KR)
JOO SE HYUN (KR)
Application Number:
PCT/KR2023/009355
Publication Date:
January 11, 2024
Filing Date:
July 03, 2023
Export Citation:
Assignee:
JOO HAK SIK (KR)
JOO SE HYUN (KR)
JOO SE HYUN (KR)
International Classes:
H05K7/20; B32B9/00; F28D15/02
Foreign References:
| JP2012138566A | 2012-07-19 | |||
| JP2006095935A | 2006-04-13 | |||
| KR20060075246A | 2006-07-04 | |||
| KR20180012702A | 2018-02-06 | |||
| KR100755014B1 | 2007-09-06 |
Attorney, Agent or Firm:
OH, Seung Keon (KR)
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