Title:
VACUUM CHUCK
Document Type and Number:
WIPO Patent Application WO/2011/065021
Kind Code:
A1
Abstract:
Disclosed is a vacuum chuck which reliably sucks, with a suction force required to the vacuum chuck, a subject to be sucked, said subject being placed on a part of the suction surface. In the vacuum chuck, when atmospheric pressure is expressed as (P1), and the minimum required suction force of the vacuum chuck is expressed as (Fmin), a suction pad having the rear surface side thereof sucked by means of a vacuum pump, which has a reached pressure of (Pu) and an air-release efficiency of (Se), satisfies the inequality of Fmin≤n∙(P1-Pu) ∙Se/(Se+C), where (n) is an aperture ratio, i.e., the ratio between the unit surface area of the suction pad and the total opening area of through holes exposed in the unit surface area, and (C) is conductance of the whole suction pad with a plurality of through holes. The vacuum chuck reliably sucks and holds the subject to be sucked with a suction force of (Fmin) or more, even there is an air leakage from a part of the suction pad not covered with the subject.
Inventors:
TAKATA, Atsushi (C/O Nano-TEM CO. LTD, 2-10, Jooka 3-chome, Nagaoka-sh, Niigata 21, 〒9400021, JP)
高田篤 (〒21 新潟県長岡市城岡３丁目２番１０号 株式会社ナノテム内 Niigata, 〒9400021, JP)
TAKATSU, Masakazu (C/O Nano-TEM CO. LTD, 2-10, Jooka 3-chome, Nagaoka-sh, Niigata 21, 〒9400021, JP)
高田篤 (〒21 新潟県長岡市城岡３丁目２番１０号 株式会社ナノテム内 Niigata, 〒9400021, JP)
TAKATSU, Masakazu (C/O Nano-TEM CO. LTD, 2-10, Jooka 3-chome, Nagaoka-sh, Niigata 21, 〒9400021, JP)
Application Number:
JP2010/006942
Publication Date:
June 03, 2011
Filing Date:
November 29, 2010
Export Citation:
Assignee:
TAKATA, Atsushi (C/O Nano-TEM CO. LTD, 2-10, Jooka 3-chome, Nagaoka-sh, Niigata 21, 〒9400021, JP)
高田篤 (〒21 新潟県長岡市城岡３丁目２番１０号 株式会社ナノテム内 Niigata, 〒9400021, JP)
Nano-TEM CO., LTD. (2-10, Jooka 3-chome Nagaoka-sh, Niigata 21, 〒9400021, JP)
株式会社ナノテム (〒21 新潟県長岡市城岡３丁目２番１０号 Niigata, 〒9400021, JP)
高田篤 (〒21 新潟県長岡市城岡３丁目２番１０号 株式会社ナノテム内 Niigata, 〒9400021, JP)
Nano-TEM CO., LTD. (2-10, Jooka 3-chome Nagaoka-sh, Niigata 21, 〒9400021, JP)
株式会社ナノテム (〒21 新潟県長岡市城岡３丁目２番１０号 Niigata, 〒9400021, JP)
International Classes:
H01L21/683; B25J15/06
Attorney, Agent or Firm:
HAYASAKI, Osamu (Room 602, Scent hills Yoyogi Bldg. 55-14, Yoyogi 1-chome, Shibuya-k, Tokyo 53, 〒1510053, JP)