Title:
VACUUM CLAMPING DETECTION METHOD AND VACUUM CLAMPING DETECTOR
Document Type and Number:
WIPO Patent Application WO/2004/106010
Kind Code:
A1
Abstract:
When the pressure-in-clamping/decalmping-path Pin decreases under the clamping detection pressure Pj, the work is judged to be clamped, and the transfer is started. During the transfer, unless the pressure-in-clamping/declamping-path Pin increases over the upper limit of the drop detection range, the work is judged not to drop from the clamper. The drop detection range is determined by adding a predetermined allowable variation width &Dgr D to the pressure-in-clamping /declamping-path Pin read as a reference pressure while the work is clamped by the clamper.
Inventors:
TAKAHASHI YUJI (JP)
Application Number:
PCT/JP2004/007567
Publication Date:
December 09, 2004
Filing Date:
May 26, 2004
Export Citation:
Assignee:
KOGANEI LTD (JP)
TAKAHASHI YUJI (JP)
TAKAHASHI YUJI (JP)
International Classes:
B23Q7/04; B25J15/06; B65G47/91; H01L21/683; H05K13/04; H05K13/08; (IPC1-7): B25J15/06
Foreign References:
| JPH10128690A | 1998-05-19 | |||
| JP2001054886A | 2001-02-27 | |||
| JP2000117676A | 2000-04-25 | |||
| JPH06305608A | 1994-11-01 |
Other References:
See also references of EP 1634680A4
Attorney, Agent or Firm:
Tsutsui, Yamato (3F Azeria Bldg., 1-1, Nishi-shinjuku 8-chom, Shinjuku-ku Tokyo 23, JP)
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