VACUUM COATING DEVICE FOR FLEXIBLE SUBSTRATE - MIASOLE EQUIPMENT INTEGRATION FUJIAN CO LTD

Title:

VACUUM COATING DEVICE FOR FLEXIBLE SUBSTRATE

Document Type and Number:

WIPO Patent Application WO/2019/109620

Kind Code:

A1

Abstract:

A vacuum coating device for a flexible substrate comprises a vacuum coating chamber (1) and a transition chamber (2) that are connected together, and the vacuum coating chamber (1) is in communication with the transition chamber (2) by means of a slit. The vacuum coating device for a flexible substrate also comprises a heat dissipation roller (3), and the heat dissipation roller (3) is mounted in the transition chamber (2) by means of a tension regulation device (4). The heat dissipation roller (3) comprises a roller body (5) and a rotating shaft (6), the roller body (5) is fixedly mounted on the rotating shaft (6), and the roller body (5) and the rotating shaft (6) are coaxially disposed. The roller body (5) is provided with a plurality of heat dissipation channels (7) arranged in the axial direction of the roller body (5). The vacuum coating device for a flexible substrate has a good heat dissipation function, and can effectively prevent the flexible substrate from wrinkles.

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Inventors:

SUN HONGXIA (CN)
ZHOU YANG (CN)
JIANG HU (CN)
HU CHAO (CN)
SHU YI (CN)
ZHU PENGJIAN (CN)
CHEN FAN (CN)
PAN DENG (CN)
LONG WEI (CN)

Application Number:

PCT/CN2018/091570

Publication Date:

June 13, 2019

Filing Date:

June 15, 2018

Export Citation:

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Assignee:

MIASOLE EQUIPMENT INTEGRATION FUJIAN CO LTD (CN)

International Classes:

C23C14/56; F28F5/02; C23C14/35

Domestic Patent References:

WO1993019874A1

1993-10-14

Foreign References:

CN101191195A	2008-06-04
CN200996042Y	2007-12-26
US20060276317A1	2006-12-07
CN203764918U	2014-08-13
CN101274720A	2008-10-01
CN101487111A	2009-07-22
CN201158699Y	2008-12-03
CN1826194A	2006-08-30
CN205688003U	2016-11-16

Attorney, Agent or Firm:

DRAGON INTELLECTUAL PROPERTY LAW FIRM (CN)

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