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Patent Searching and Data


Title:
VACUUM DEVICE AND MASS SPECTROMETER
Document Type and Number:
WIPO Patent Application WO/2019/187352
Kind Code:
A1
Abstract:
In this mass spectrometer, a first chamber and a second chamber communicate via an opening. When a closing part 34 moves toward an opening 51 due to the actions of a first displacement mechanism and a second displacement mechanism, a contact 38 moves along with the closing part 34 toward the opening 51. The opening 51 is then closed up by the closing part 34. Due to the opening 51 being closed up, the opening in the second chamber is closed up. The contact 38 comes into contact with an electrode 5. A detection unit 40 detects a change in voltage or current of the contact 38. Thus, the closed state of an opening 201 can be detected merely by the detection unit 40 detecting the change in voltage or current.

Inventors:
HOSOI, Kosuke (1 Nishinokyo-Kuwabara-cho, Nakagyo-ku, Kyoto-sh, Kyoto 11, 〒6048511, JP)
Application Number:
JP2018/044581
Publication Date:
October 03, 2019
Filing Date:
December 04, 2018
Export Citation:
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Assignee:
SHIMADZU CORPORATION (1 Nishinokyo-Kuwabara-cho, Nakagyo-ku Kyoto-sh, Kyoto 11, 〒6048511, JP)
International Classes:
F16K51/02; F16K37/00; H01J49/24
Foreign References:
JPH0942531A1997-02-14
JP2015040574A2015-03-02
JPH0171856U1989-05-15
EP3372883A12018-09-12
Attorney, Agent or Firm:
YOSHIMOTO, Tsutomu et al. (MELON IP LAW FIRM, Shinsaibashi-Tanimoto Bldg. 4-15, Bakuro-machi 3-chome, Chuo-ku, Osaka-sh, Osaka 59, 〒5410059, JP)
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