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Patent Searching and Data


Title:
VACUUM DEVICE AND VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2017/168557
Kind Code:
A1
Abstract:
In order to make it possible to suppress resolution deterioration due to vibration of an exhaust system, and measure a vacuum degree without providing an extra vacuum measurement gage, a vacuum device of the present invention is configured by being provided with: an electron-gun chamber having an electron source provided therein; an optical lens barrel having an irradiation optical system for irradiating a sample with an electron beam emitted from the electron source; a cathode, which is electrically insulated from the electron-gun chamber, and which is formed of a non-evaporating getter alloy; an anode covering the periphery of the cathode at a predetermined interval from the cathode; a magnetic field forming unit that forms a magnetic field in a region between the cathode and the anode; and a current detection unit that detects a current flowing in the cathode.

Inventors:
KATAGIRI Souichi (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
OHSHIMA Takashi (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
Application Number:
JP2016/060095
Publication Date:
October 05, 2017
Filing Date:
March 29, 2016
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
International Classes:
G01L21/30; H01J41/06; H01J41/20
Foreign References:
JP2009128276A2009-06-11
JP5855294B12016-02-09
JP2012520962A2012-09-10
JP2001357814A2001-12-26
JP2007157682A2007-06-21
Attorney, Agent or Firm:
POLAIRE I.P.C. (13-11, Nihonbashikayabacho 2-chome Chuo-k, Tokyo 25, 〒1030025, JP)
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