Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
VACUUM DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/134058
Kind Code:
A1
Abstract:
A vacuum device, which comprises a chamber (10) that may be opened and shut; the chamber is internally provided with an accommodating space (11), the accommodating space (11) being equipped with a work platform (20), a processing source production module (30), a power supply unit group (50), and a vacuum air-suction module (40) that is in communication with the accommodating space. The power supply unit group (50) provides electrical power required for the work platform (20) and the processing source production module (30).

Inventors:
YANG, Szu-nan (No. 6-1, Ziqiang 7th Rd. Zhongli Dist, Taoyuan City Taiwan, 32063, CN)
Application Number:
CN2018/000010
Publication Date:
July 11, 2019
Filing Date:
January 05, 2018
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
PROLOGIUM TECHNOLOGY CO., LTD. (No. 6-1, Ziqiang 7th Rd. Zhongli Dist, Taoyuan City Taiwan, 32063, CN)
PROLOGIUM HOLDING INC. (P.O. Box 309, Ugland House, Grand Cayman, KY1-1104, KY)
International Classes:
H05H1/46; H01L21/00
Attorney, Agent or Firm:
HUAHE IP LIMITED (Room A-909, Huibin BuildingNo. 8, Beichendong Street, Chaoyang District, Beijing 1, 100101, CN)
Download PDF: