Title:
VACUUM EVACUATION SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND METHOD FOR OPERATING VACUUM EVACUATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2010/038416
Kind Code:
A1
Abstract:
Multiple vacuum evacuation pumps each comprising a refrigerating machine are connected to a common compressor. At least one of the multiple vacuum evacuation pumps is operated so as to repeat an operation including a step in which the interior of a cylinder is shifted from a low-pressure state to a high-pressure state by the operation of a valve of the refrigerating machine and thereby gas in the low-pressure state is adiabatically compressed, and a step in which a displacer passes through the adiabatically compressed gas. At least another one of the multiple vacuum evacuation pumps is operated so as to repeat an operation including a step in which the interior of a cylinder is shifted from a high-pressure state to a low-pressure state by the operation of a valve of the refrigerating machine and thereby gas in the high-pressure state is adiabatically expanded, and a step in which a displacer passes through the adiabatically expanded gas.
Inventors:
OKADA TAKAHIRO (JP)
AOKI KAZUTOSHI (JP)
KOMAI HISAYOSHI (JP)
AOKI KAZUTOSHI (JP)
KOMAI HISAYOSHI (JP)
Application Number:
PCT/JP2009/004968
Publication Date:
April 08, 2010
Filing Date:
September 29, 2009
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
OKADA TAKAHIRO (JP)
AOKI KAZUTOSHI (JP)
KOMAI HISAYOSHI (JP)
OKADA TAKAHIRO (JP)
AOKI KAZUTOSHI (JP)
KOMAI HISAYOSHI (JP)
International Classes:
F04B37/08; F25B9/14
Foreign References:
| JP2004003792A | 2004-01-08 | |||
| JPH0735070A | 1995-02-03 | |||
| JPH08150333A | 1996-06-11 | |||
| JPH08135570A | 1996-05-28 | |||
| JPH06346848A | 1994-12-20 |
Attorney, Agent or Firm:
OHTSUKA, YASUNORI (JP)
Yasunari Otsuka (JP)
Yasunari Otsuka (JP)
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