Title:
VACUUM EVAPORATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/068389
Kind Code:
A1
Abstract:
A vacuum evaporation apparatus. A magnetic plate (120) is designed to comprise a plurality of magnetic plate units (121) respectively corresponding to different regions on a metal mask plate (200), and the magnetic plate (120) forms an attachment to the corresponding regions on the metal mask plate (200) on a lower surface of a substrate (300) due to the magnetic force of the magnetic plate units (121). A magnetic plate driving mechanism (130) comprises a plurality of driving units (131) correspondingly connected on a one-to-one basis to the plurality of magnetic plate units (121). The plurality of magnetic plate units (121) move up and down independently, driven by the corresponding driving units (131), so that the movement sequence of the plurality of magnetic plate units (121) can be adjusted, thereby fully releasing the stress produced during the attachment of the mask of the metal mask plate (200) to the substrate (300), reducing metal mask plate (200) design difficulties and improving product yield. Moreover, a corresponding magnetic plate unit (121) can be adjusted according to the color mixing status of the product thus increasing equipment utilization rates, and the magnetic force applied to corresponding regions of the metal mask plate (200) can be separately adjusted to allow localized color mixing of the product.
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Inventors:
JIANG LIANG (CN)
Application Number:
PCT/CN2016/110731
Publication Date:
April 19, 2018
Filing Date:
December 19, 2016
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECT (CN)
International Classes:
C23C14/04
Foreign References:
| CN205368488U | 2016-07-06 | |||
| CN205420529U | 2016-08-03 | |||
| CN103981491A | 2014-08-13 | |||
| CN103668049A | 2014-03-26 | |||
| US20070072337A1 | 2007-03-29 | |||
| JP2004259598A | 2004-09-16 |
Attorney, Agent or Firm:
COMIPS INTELLECTUAL PROPERTY OFFICE (CN)
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