Title:
VACUUM EVAPORATION SOURCE
Document Type and Number:
WIPO Patent Application WO/2019/054530
Kind Code:
A1
Abstract:
The technical objective of the present invention is to provide a vacuum evaporation source enabling effective heating of the bottom surface of a crucible. To this end, a vacuum evaporation source of the present invention, having a crucible in an inner space portion of a case, comprises: a bottom-surface reflective portion which is positioned on the upper part of a lower space formed between the bottom surface of the crucible and the floor surface of the inner space portion; a support portion which is provided on the floor surface of the inner space portion and is for supporting the bottom-surface reflective portion; and a heater which is positioned between the lateral surface of the inner space portion and the outer lateral surface of the crucible and extends to the upper surface of the bottom-surface reflective portion.
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Inventors:
HWANG DO WEON (KR)
Application Number:
PCT/KR2017/010095
Publication Date:
March 21, 2019
Filing Date:
September 14, 2017
Export Citation:
Assignee:
ALPHA PLUS CO LTD (KR)
International Classes:
C23C14/24; C23C14/26
Foreign References:
| JPH10214787A | 1998-08-11 | |||
| KR20100053365A | 2010-05-20 | |||
| JP2015124440A | 2015-07-06 | |||
| KR20140042656A | 2014-04-07 | |||
| KR20150102431A | 2015-09-07 |
Attorney, Agent or Firm:
MI PATENT AND LAW FIRM (KR)
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