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Title:
VACUUM EXHAUST DEVICE COUPLING STRUCTURE AND VACUUM EXHAUST SYSTEM
Document Type and Number:
WIPO Patent Application WO/2012/066780
Kind Code:
A1
Abstract:
Provided is a coupling structure for a vacuum exhaust device which is a coupling structure for a plurality of vacuum exhaust devices. The plurality of vacuum exhaust devices each has: a casing that forms at least one pump chamber; and an air intake port and an exhaust port that are disposed in the casing and communicate with the pump chamber. The casing for a first vacuum exhaust device among the plurality of vacuum exhaust devices and the casing for a second vacuum exhaust device are directly connected such that the pump chamber in the first vacuum exhaust device and the pump chamber in the second vacuum exhaust device communicate.

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Inventors:
SUZUKI TOSHIO (JP)
SHIBAYAMA KOUJI (JP)
Application Number:
PCT/JP2011/006395
Publication Date:
May 24, 2012
Filing Date:
November 16, 2011
Export Citation:
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Assignee:
ULVAC INC (JP)
SUZUKI TOSHIO (JP)
SHIBAYAMA KOUJI (JP)
International Classes:
F04C23/00; F04B37/16
Foreign References:
JP2004100594A2004-04-02
JPH03145594A1991-06-20
JPH01113183U1989-07-31
JPH09502001A1997-02-25
Attorney, Agent or Firm:
OMORI, JUNICHI (JP)
Omori Junichi (JP)
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