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Title:
VACUUM EXHAUST DEVICE COUPLING STRUCTURE AND VACUUM EXHAUST SYSTEM
Document Type and Number:
WIPO Patent Application WO/2012/066782
Kind Code:
A1
Abstract:
Provided is a coupling structure for vacuum exhaust devices, where each vacuum exhaust device comprises a pump chamber and a casing that demarcates the pump chamber. The coupling structure comprises a first end surface formed on a first side of the casing and a second end surface formed on a second side that is the opposite side to the first side. The casing for the first vacuum exhaust device and the casing for the second vacuum exhaust device are arranged directly overlapping so that a first end surface provided in a first vacuum exhaust device among the plurality of vacuum exhaust devices and a second end surface provided in a second vacuum exhaust device are touching. By fastening the first end surface and the second end surface, the first vacuum exhaust device and the second vacuum exhaust device are connected such that gas can flow between the casing for the first vacuum exhaust device and the casing for the second vacuum exhaust device.

Inventors:
SUZUKI TOSHIO (JP)
TANAKA TOMONARI (JP)
Application Number:
PCT/JP2011/006397
Publication Date:
May 24, 2012
Filing Date:
November 16, 2011
Export Citation:
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Assignee:
ULVAC INC (JP)
SUZUKI TOSHIO (JP)
TANAKA TOMONARI (JP)
International Classes:
F04C23/00; F04B37/16; F04C25/02
Domestic Patent References:
WO2008152713A12008-12-18
Foreign References:
JP2004100594A2004-04-02
JPH09502001A1997-02-25
JPH03145594A1991-06-20
JPH01113183U1989-07-31
JP2010138725A2010-06-24
JPS579726U1982-01-19
JPH0522333U1993-03-23
Attorney, Agent or Firm:
OMORI, JUNICHI (JP)
Omori Junichi (JP)
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Claims:



 
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