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Title:
VACUUM EXHAUST DEVICE AND VACUUM EXHAUST METHOD, AND SUBSTRATE TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/080980
Kind Code:
A1
Abstract:
Disclosed is a vacuum exhaust method wherein, when an operation (standby operation) in which the existing vacuum state is maintained, is performed, one vacuum pump (12a) exhausts air from the volume chambers in the final stages of the other vacuum pumps (12), to maintain the vacuum of the final stages of the other vacuum pumps (12); the power necessary for the other vacuum pumps (12) during a standby operation is only a machine loss; and the power consumption in the vacuum pumps (12) is drastically suppressed without using an auxiliary pump, etc.

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Inventors:
INOUE TOSHIYA (JP)
HASHIMOTO KENJI (JP)
YAMAMOTO MASAHIRO (JP)
Application Number:
PCT/JP2010/071234
Publication Date:
July 07, 2011
Filing Date:
November 29, 2010
Export Citation:
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Assignee:
ULVAC INC (JP)
INOUE TOSHIYA (JP)
HASHIMOTO KENJI (JP)
YAMAMOTO MASAHIRO (JP)
International Classes:
F04B37/16; F04C25/02
Foreign References:
JP2003139054A2003-05-14
JPH07167053A1995-07-04
JP2003161281A2003-06-06
JP2007231938A2007-09-13
Attorney, Agent or Firm:
KURIHARA, Hiroyuki et al. (JP)
Hiroyuki Kurihara (JP)
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