Title:
VACUUM EXHAUST MECHANISM, COMPOUND VACUUM PUMP, AND ROTATING BODY COMPONENT
Document Type and Number:
WIPO Patent Application WO/2015/098275
Kind Code:
A1
Abstract:
In the present invention, a vacuum pump has a Siegbahn molecular pump section, wherein spiral grooves having peak and valley parts are carved (disposed) in each fixed disk and/or rotary disk to be disposed, and is structured so as to ensure high conductance at each return flow passage formed at the outer periphery (outside) in the Siegbahn molecular pump section. This structure is formed inside the vacuum pump by means of communicating parts (groove parts, slits) that are formed in the rotary disks or by means of swash plates that are arranged on the fixed disks and the communicating parts that are formed in the rotary disks. The "communicating part," "groove part," and "slit" are "concave," and the concave part is provided by forming a groove on the outer diameter part of the rotary disk (or fixed disk) toward the inner diameter direction (toward the side where a shaft is disposed in the vacuum pump).
Inventors:
NONAKA MANABU (JP)
KABASAWA TAKASHI (JP)
KABASAWA TAKASHI (JP)
Application Number:
PCT/JP2014/078688
Publication Date:
July 02, 2015
Filing Date:
October 29, 2014
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2009235922A | 2009-10-15 | |||
| JP2009203906A | 2009-09-10 | |||
| JP2009047178A | 2009-03-05 | |||
| JPH046591U | 1992-01-21 | |||
| JPS60204997A | 1985-10-16 | |||
| JPH02501275A | 1990-05-10 |
Other References:
See also references of EP 3088744A4
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