Title:
VACUUM FILM FORMING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2006/038407
Kind Code:
A2
Abstract:
A vacuum film forming apparatus additionally having a plasma polymerization function using a cylindrical member a pat of which is used as a target. A vacuum film forming apparatus (100) comprises a conductive vacuum vessel (13) having an internal space, a frame body (15) constructed to have a generally cylindrical shape by arranging curved members (31, 32) curved into a fan shape in the internal space (10), a magnetic field producing device (33) disposed inside the frame body (15) and adapted for producing a magnetic field along the circumference of the frame body (15). At least one of the curved members (15, 16) is a target used for sputtering, and the region other than the target of the frame body (15) is a device used for plasma polymerization.
Inventors:
Takigawa, Shirou
Katou, Keiji
Yoneyama, Nobuo
Katou, Keiji
Yoneyama, Nobuo
Application Number:
PCT/JP2005/016218
Publication Date:
April 13, 2006
Filing Date:
September 05, 2005
Export Citation:
Assignee:
SHINMAYWA INDUSTRIES, LTD. (1-1 Shinmeiwa-cho, Takarazuka-shi Hyogo, 50, 66585, JP)
Takigawa, Shirou
Katou, Keiji
Yoneyama, Nobuo
Takigawa, Shirou
Katou, Keiji
Yoneyama, Nobuo
International Classes:
C23C14/35; C23C14/34; C23C16/50
Attorney, Agent or Firm:
Sumida, Yoshihiro (ARCO PATENT OFFICE, 3rd Fl. Bo-eki Bldg., 123-1, Higashimachi, Chuo-k, Kobe-shi Hyogo 31, 65000, JP)
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