Title:
VACUUM GAUGE AND CONTAMINATION DIAGNOSIS METHOD
Document Type and Number:
WIPO Patent Application WO/2016/017720
Kind Code:
A1
Abstract:
Provided are: a vacuum gauge that, with a simple configuration, can accurately diagnose the degree of contamination of the vacuum gauge; and a contamination diagnosis method that, with a simple process, can accurately diagnose the degree of contamination of a vacuum gauge. Provided is a cold cathode ionization vacuum gauge that has a normal operation mode and a contamination diagnosis mode, the cold cathode ionization vacuum gauge comprising: an anode 1 and a cathode 3 that are for measuring vacuum pressure in the normal operation mode; an anode 7 and the cathode 3 that are for measuring the vacuum pressure in the contamination diagnosis mode; and a controller 10 that compares the size of a current measured between the anode 7 and the cathode 3 and the size of a current measured between the anode 1 and the cathode 3.
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Inventors:
YOSHIDA HAJIME (JP)
Application Number:
PCT/JP2015/071563
Publication Date:
February 04, 2016
Filing Date:
July 29, 2015
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
International Classes:
G01L27/00; G01L21/32; G01L21/34
Foreign References:
| JP5370329B2 | 2013-12-18 |
Other References:
See also references of EP 3196622A4
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