VACUUM GAUGE AND PRESSURE MEASUREMENT SYSTEM COMPRISING VACUUM GAUGE

WIPO Patent Application WO/2020/121576

A1

Provided are a vacuum gauge that makes it possible to simply set and change a setting value and a pressure measurement system comprising the vacuum gauge.　The vacuum gauge PG has a body 1 attached to an object Vc under measurement and measures the internal pressure of the body 1. Provided inside the body are: a sensor unit 20 that operates by receiving supplied power; a control unit 30 that controls the operation of the sensor unit, processes input from the sensor unit, and outputs a prescribed signal; and a first power supply circuit unit 40 that receives power supplied from an external power supply 41 and supplies power to the control unit and sensor unit. Further provided inside the body are: a second power supply circuit unit 50 that is connected to a terminal device Mt through wiring or wirelessly, receives power from the terminal device, and at least supplies power to the control unit and a communication circuit unit 60 that, if power is supplied to the control unit through the first power supply circuit unit or second power supply circuit unit, connects the control unit to the terminal device via a communication line 61 such that the terminal device and control unit can communicate freely.

SATO TAKANOBU (JP)
NAKAJIMA TOYOAKI (JP)
MIYASHITA TAKESHI (JP)
FUKUHARA MASAHIRO (JP)
YOSHIZAWA HIDEKI (JP)

PCT/JP2019/027468

June 18, 2020

July 11, 2019

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ULVAC INC (JP)

G01L9/00; G01L19/12; G01L21/00; G01L21/12

JP2007012019A

2007-01-18

SEIGA PATENT AND TRADEMARK CORPORATION (JP)

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