Title:
VACUUM HEATING DEVICE AND REFLECTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/100376
Kind Code:
A1
Abstract:
Provided is a vacuum heating device having a reflector device for which damage due to thermal expansion does not occur. A plurality of unit reflectors 31 arranged in a matrix are mounted on a mounting surface 19 of a vacuum chamber 17 by a fixing device 21 and holding devices 11a to 11d. When the unit reflectors 31 are irradiated with infrared rays, along with the deformation of the deformable portions 64 of the holding devices 11a to 11d, each of the unit reflectors 31 thermally expand around the place where the fixing device 21 is mounted. Due to the thermal expansion, the force applied to each of the unit reflectors 31 is reduced and damage to the portion where each of the unit reflectors 31 is mounted on the mounting surface 19 is prevented.
Inventors:
SAKAUE HIROTOSHI (JP)
OONO TETSUHIRO (JP)
OONO TETSUHIRO (JP)
Application Number:
PCT/JP2019/033320
Publication Date:
May 22, 2020
Filing Date:
August 26, 2019
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
F27B17/00; F27D7/06; F27D11/02; H01L21/26
Foreign References:
| JP2018037482A | 2018-03-08 | |||
| JPH06128750A | 1994-05-10 | |||
| JP2017180865A | 2017-10-05 | |||
| JPS58164222A | 1983-09-29 |
Attorney, Agent or Firm:
ISHIJIMA Shigeo et al. (JP)
Download PDF:
Previous Patent: CONTROL DEVICE, BASE STATION APPARATUS, TERMINAL DEVICE, CONTROL METHOD, AND PROGRAM
Next Patent: POWER SEMICONDUCTOR DEVICE
Next Patent: POWER SEMICONDUCTOR DEVICE