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Patent Searching and Data


Title:
VACUUM AND PRESSURE FORMING EXPOSURE APPARATUS AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2010/082686
Kind Code:
A1
Abstract:
Disclosed is an exposure apparatus which has a highly reproducible positioning precision and in which a photomask with high adhesion even to a forming die having a complicated solid shape can be easily manufactured and a repetitive exposure can be performed. A vacuum and pressure forming exposure apparatus in which a predetermined pattern is transferred onto a resist film formed on a surface of a hot press forming die by exposure is comprised of a hermetic container in which a forming die having a resist film formed on the surface thereof is hermetically received, a placement base on which the forming die is placed, a heating mechanism which heats and softens a sheet having a predetermined patter formed thereon, a suction portion which holds a lower surface of the softened sheet on the placement base due to suction when the softened sheet is applied onto the forming die, a suction mechanism connected to the suction portion, an exposure mechanism which is adapted to expose the pattern on the sheet to light to transfer the same onto the resist film, and a gas supply portion which supplies a gas for pressurizing the hermetic container.

Inventors:
ISHIMORI, Yuuichi (6-1 Marunouchi 2-chome, Chiyoda-k, Tokyo 71, 〒1008071, JP)
石森裕一 (〒71 東京都千代田区丸の内二丁目6番1号新日本製鐵株式会社内 Tokyo, 〒1008071, JP)
FUKUCHI, Hiroshi (6-1 Marunouchi 2-chome, Chiyoda-k, Tokyo 71, 〒1008071, JP)
福地弘 (〒71 東京都千代田区丸の内二丁目6番1号新日本製鐵株式会社内 Tokyo, 〒1008071, JP)
Application Number:
JP2010/050743
Publication Date:
July 22, 2010
Filing Date:
January 15, 2010
Export Citation:
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Assignee:
NIPPON STEEL CORPORATION (6-1 Marunouchi 2-chome, Chiyoda-ku Tokyo, 71, 〒1008071, JP)
新日本製鐵株式会社 (〒71 東京都千代田区丸の内二丁目6番1号 Tokyo, 〒1008071, JP)
ISHIMORI, Yuuichi (6-1 Marunouchi 2-chome, Chiyoda-k, Tokyo 71, 〒1008071, JP)
石森裕一 (〒71 東京都千代田区丸の内二丁目6番1号新日本製鐵株式会社内 Tokyo, 〒1008071, JP)
FUKUCHI, Hiroshi (6-1 Marunouchi 2-chome, Chiyoda-k, Tokyo 71, 〒1008071, JP)
International Classes:
G03F7/20; B21D24/00; B21D37/20; B29C33/38
Foreign References:
JP2005169394A
JP2004345286A
JP2004184872A
JP2001242634A
Attorney, Agent or Firm:
AOKI, Atsushi et al. (SEIWA PATENT & LAW, Toranomon 37 Mori Bldg. 5-1, Toranomon 3-chome, Minato-k, Tokyo 23, 〒1058423, JP)
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